榪戞棩錛屽搱灝?dāng)婊ㄥ伐涓氬ぇ瀛︺佸叞宸炲ぇ瀛︺佺編鍥藉姞宸炲ぇ瀛︽礇鏉夌煻鍒嗘牎銆佸姞宸炲ぇ瀛︿集鍏嬪埄鍒嗘牎絳夐珮鏍＄爺絀朵漢鍛樺叡鍚屽悎鎴愬嚭綾沖眰鐘剁粨鏋勭殑鍙屾洸綰跨粨鏋勯櫠鐡鋒皵鍑濊兌錛岃鏉愭枡鍙互鏋佸ぇ澧炲己浼犵粺闄剁摲姘斿嚌鑳舵潗鏂欑殑鍚勯」鎬ц兘錛屼負(fù)瑙ｅ喅闄剁摲瓚呰交緇撴瀯鐨勮剢鎬ч棶棰橈紝浠ュ強鍙楃儹鏋愭櫠闂鎻愪緵浜嗙爺絀舵濊礬錛屼績榪涗簡闄剁摲姘斿嚌鑳跺湪闅旂儹銆佸偓鍖栥佽兘婧愩佺幆澧冩不鐞嗐佽埅絀鴻埅澶╃瓑棰嗗煙鐨勫簲鐢ㄣ?/span>
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寰愮繑琛ㄧず錛岄櫠鐡鋒皵鍑濊兌CVD鐨勫埗澶囨槸鐮旂┒鐨勫叧閿備負(fù)璧嬩簣闄剁摲姘斿嚌鑳舵煍闊фэ紝鎺у埗瀛斿澹佸帤錛屾彁楂橀櫠鐡鋒皵鍑濊兌緇撴櫠鎬э紝騫跺疄鐜扮粨鏋勮璁★紝鐮旂┒浜哄憳鍘嗙粡浜嗚繎鍗冩鐨勫弽澶嶅疄楠屻傛澶栵紝闄剁摲姘斿嚌鑳跺叿鏈夌殑瓚呰交鐗規(guī)т嬌寰楀晢鐢ㄦ祴閲忕郴緇熸棤娉曟祴璇曞叾瀵肩儹緋繪暟錛屼負(fù)姝わ紝鐮旂┒鍥㈤槦鎼緩浜嗕笓闂ㄧ殑嫻嬮噺璁懼錛屽茍榪涜浜嗗彲闈犳ц璇佸伐浣溿?/span>
