writer：Xili Gao, Qingzhong Xue(*), Lanzhong Hao, Qingbin Zheng, and Qun Li
keywords：carbon film/silicon heterojunctions
source：期刊
specific source：APPLIED PHYSICS LETTERS 91, 122110 2007
Issue time：2007年
The amorphous carbon film/n-Si (a-C/Si) junctions have been fabricated by magnetron sputtering. The results show that these junctions have good rectifying properties and high ammonia (NH3) gas sensitivity. For a given reverse bias voltage, the resistance of the junction can increase by 100 times rapidly when exposed to NH3 gas. This phenomenon may be attributed to the change of the space charge width of the junction, which is caused by the adsorption of NH3 gas molecules. This study shows that these a-C/Si junctions have potential application as NH3 gas detect sensors.